The microfabrication facilityies at the University of Texas at Austin is called MRC (microelectronics research center). It is located at theJJ.pickle remote campus.
1. Atomic layer deposition(Fiji ALD)
The standard recipe for the deposition of Al2O3 will deposit 0.1nm of Al2O3 for one cycle.
It is very convenient to use. Instructions to use such an equippment have been put up on youtube by the wonderful stuff of MRC at this link:
2. DRIE(deep reactive ion etching)
DRIE is very important in MEMS fabrication. It can be used to generate very high aspect ratio walls. Perfect for the generating cavities in a CMUT and PMUT structure and releasing of microcantilever.
Also the training video from MRC is available for this tool.